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发明名称
MANUFACTURE OF SEMICONDUCTOR ELEMENT
摘要
申请公布号
JPH03293724(A)
申请公布日期
1991.12.25
申请号
JP19900094956
申请日期
1990.04.12
申请人
OKI ELECTRIC IND CO LTD
发明人
HONMA TOSHIHIRO
分类号
H01L23/52;H01L21/265;H01L21/3205;H01L29/423;H01L29/43;H01L29/49;H01L29/786
主分类号
H01L23/52
代理机构
代理人
主权项
地址
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