| 摘要 |
PURPOSE:To improve working efficiency without increasing the size of the machine by providing an optical path length adjusting means which holds the optical path length of a laser beam from a laser beam generating source to an irradiation port for the laser beam at a specified distance. CONSTITUTION:A laser beam oscillator 2 leads the laser beam through the optical path protected by a laser beam protecting member 7 via the optical path length regulating means 3 up to the irradiation port 9 for the laser beam. A moving device 4 moves an irradiating part 8 having the irradiating port 9 in triaxial directions; X, Y, Z in accordance with the control signal of a control device 6, thereby holding the optical path length of the laser beam at the specified distance. |
