发明名称 Quantum well optical device on silicon
摘要 A semiconductor structure for use in forming optical devices, such as lasers and LEDs, is disclosed. The structure includes a silicon base on which is formed by epitaxial growth, a crystalline material (such as AlGaP) structure or region that is nearly lattice matched to silicon. One or more quantum wells are formed in the crystalline material structure. A quantum well can be made of a direct bandgap material or an indirect bandgap material with isoelectronic centers (IECs). The regions on either side of the quantum wells can be graded to form a graded index separate confinement heterostructure (GRINSCH). To reduce problems of warpage, the crystalline material can be epitaxially grown in windows formed in a layer of silicon nitride or silicon dioxide on the silicon substrate. A multi-color array of optical devices can be provided with this structure.
申请公布号 US5075743(A) 申请公布日期 1991.12.24
申请号 US19890362252 申请日期 1989.06.06
申请人 CORNELL RESEARCH FOUNDATION, INC. 发明人 BEHFAR-RAD, ABBAS
分类号 H01L27/15;H01L33/06;H01S5/02;H01S5/323;H01S5/34;H01S5/343;H01S5/347;H01S5/42 主分类号 H01L27/15
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