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发明名称
HEAT-TREATING EQUIPMENT
摘要
申请公布号
JPH03291917(A)
申请公布日期
1991.12.24
申请号
JP19900093395
申请日期
1990.04.09
申请人
TOKYO ELECTRON SAGAMI LTD
发明人
TAKADO MAKOTO
分类号
H01L21/22;H01L21/205;H01L21/31
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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