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发明名称
SEMICONDUCTOR DEVICE AND ITS MANUFACTURE
摘要
申请公布号
JPH03291919(A)
申请公布日期
1991.12.24
申请号
JP19900093417
申请日期
1990.04.09
申请人
NEC CORP
发明人
TSUNENARI YOSHITSUGU
分类号
H01L21/28;H01L21/285;H01L21/768
主分类号
H01L21/28
代理机构
代理人
主权项
地址
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