| 摘要 |
<p>PURPOSE:To enable charge which attracts the polarized charge on the surface of an attracted body to concentrate on the surface of a pair of protrusions to make an electronic chuck possessed of an enough attractive force by a method wherein the protrusions formed on the surface of an insulating layer of the electrostatic chuck are so set as to nearly overlap a pair of electrodes provided inside the insulating layer in a plane view. CONSTITUTION:A ceramic insulating layer 5 is formed on the upside of a board a covering electrodes 4a and 4b, and the upside of the insulating layer 5 is made to serve as a mount where an attracted body W such as a semiconductor wafer or the like is placed. Protrusions 5a are formed on the surface of the insulating layer 5 overlapping the electrodes 4a and 4b in a planar view, the underside of the sucked body W is brought into contact with the protrusions 5a, and a gap 6 is formed between a recess 5b and the underside of the sucked body W. When a voltage is applied between the electrodes 4a and 4b to induce an electrical field, polarized charge is induced in the contact area of the sucked body W with the insulating layer 5 and charge opposite to the polarized charge is induced in the protrusion 5a, and the attracted body is attracted by the the attractive force of the electrodes 4a and 4b.</p> |
