| 摘要 |
A compressor with a flexible diaphragm used as the pumping element, said compressor further including a sensor to monitor the position of the diaphragm and a control circuit for maintaining the diaphragm position in a preselected range to avoid contact between the diaphragm and the rest of the compressor. The compressor also includes an expansion member for compensating for the thermal expansion and compressibility of the working fluid of the compressor.
|
