发明名称 MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要 PURPOSE:To obtain a semiconductor device which is flat and in which a semiconductor thin wire can be formed in a straight shape or in an arbitrary shape. CONSTITUTION:An undoped Al0.3Ga0.7As layer 2, an undoped GaAs layer 3 and an undoped Al0.3Ga0.7As layer 4 are formed sequentially on a semiinsulating GaAs substrate 1 provided with a 100 plane. Then, this assembly is cleaved in the direction of a 110 plane perpendicular to the 100 plane; a section 5 which traverses the interface between the undoped Al0.3Ga0.7As layer 2 and the undoped GaAs layer 3 and the interface between the undoped GaAs layer 3 and the undoped Al0.3Ga0.7As layer 4 is formed.
申请公布号 JPH03291969(A) 申请公布日期 1991.12.24
申请号 JP19900093423 申请日期 1990.04.09
申请人 NEC CORP 发明人 OKAMOTO AKIHIKO
分类号 H01L29/06;H01L29/201;H01S5/00 主分类号 H01L29/06
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