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发明名称
SURFACE INSPECTION APPARATUS
摘要
申请公布号
US5074668(A)
申请公布日期
1991.12.24
申请号
US19890409073
申请日期
1989.09.19
申请人
KABUSHIKI KAISHA TOSHIBA
发明人
FUKAZAWA, CHIAKI;AIZAWA, KENJI
分类号
G01B11/30;G01N21/88;G01N21/89;G01N21/892
主分类号
G01B11/30
代理机构
代理人
主权项
地址
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