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发明名称
SI DRYETCHING PROCESS
摘要
申请公布号
JPH03292732(A)
申请公布日期
1991.12.24
申请号
JP19900094525
申请日期
1990.04.10
申请人
NEC CORP
发明人
IGAWA EIJI
分类号
H01L21/302;H01L21/3065
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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