APPARATUS FOR MEASUREMENT OF DEEP LEVEL IN SEMICONDUCTOR,申请号JP19900052588-传众专利搜索

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发明名称	APPARATUS FOR MEASUREMENT OF DEEP LEVEL IN SEMICONDUCTOR
摘要
申请公布号	JPH03290944(A)	申请公布日期	1991.12.20
申请号	JP19900052588	申请日期	1990.03.06
申请人	UNIV NAGOYA	发明人	AKASAKI ISAMU;HIRAMATSU KAZUMASA;SHIYU KINSEI
分类号	G01R31/26;H01L21/66	主分类号	G01R31/26
代理机构		代理人
主权项
地址

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