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发明名称
MAGAZINE RECOVERY DEVICE OF IC HANDLER
摘要
申请公布号
JPH03291576(A)
申请公布日期
1991.12.20
申请号
JP19900092167
申请日期
1990.04.09
申请人
HITACHI ELECTRON ENG CO LTD
发明人
HIROKAWA HIDEO;SUGIYAMA UMENORI;KAZAMA SEIJI
分类号
G01R31/26;G01R31/00;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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