| 摘要 |
<p>PURPOSE:To form a liquid crystal and a driving circuit on the same substrate, to miniaturize a device and to attain the reduction in weight by connecting one MIN element to each picture element on the substrate and making its insulator of hard carbon and forming a driving circuit on the same substrate. CONSTITUTION:A quartz substrate is used as a substrate 1, and a driving circuit 10 consisting of a TFT is formed on this substrate. ITO is vapor-deposited as a picture element electrode 4 and is patterned, and Al is vapor-deposited as a lower electrode 7 and is patterned. A hard carbon film 2 is accumulated on them by the plasma CVD method, and Ni is accumulated as an upper electrode 6 of a second conductor and is patterned. Meanwhile, ITO is accumulated and patterned on the other transparent substrate 1' to form a common picture element electrode 4', and a liquid crystal material is enclosed between both substrates. Thus, the device is miniaturized. Thus, the reduction in weight, and reduction in the cost and the improvement of the yield are realized.</p> |
