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发明名称
BONDING DEVICE OF SEMICONDUCTOR CHIP
摘要
申请公布号
JPH03289147(A)
申请公布日期
1991.12.19
申请号
JP19900090844
申请日期
1990.04.05
申请人
MATSUSHITA ELECTRIC IND CO LTD
发明人
HIDESE WATARU
分类号
H01L21/52
主分类号
H01L21/52
代理机构
代理人
主权项
地址
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