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发明名称
VERFAHREN ZUR HERSTELLUNG EINES SPUTTER-TARGETS.
摘要
申请公布号
DE3682493(D1)
申请公布日期
1991.12.19
申请号
DE19863682493
申请日期
1986.12.22
申请人
PLANSEE TIZIT GES.M.B.H., REUTTE, TIROL, AT
发明人
KNY, DR., ERICH, A-6600 PFLACH, AT
分类号
C04B35/58;C04B35/56;C22C1/05;C23C14/34;(IPC1-7):C23C14/34;C04B38/04
主分类号
C04B35/58
代理机构
代理人
主权项
地址
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