摘要 |
PURPOSE:To precisely move a designated point of a linear motor with an electrostrictive element to a required position by applying a voltage based on an integral fairing signal to the electrostrictive element and moving a position of an inertia body to a target position of movement. CONSTITUTION:Since an inertia body 32 is moved to a position where a value set by a value setting means 17 corresponds to a count value represented by a count signal s8, a moving position of the inertia body 32 can be freely set by the value setting means 17. Also, an up-down counter 15 is formed as resettable at zero and reset at zero at the completion of movement of the inertia body 32. If the up-down counter 15 is set at a certain value by the value setting means 17, the inertia body 32 can be moved from a position where the counter 15 is reset at zero, to a required position in a required direction. This enables precise determination of a position of the inertia body 32 with a linear motor formed with an electrostrictive element 33 and having a smaller friction force. |