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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03289131(A)
申请公布日期
1991.12.19
申请号
JP19900090357
申请日期
1990.04.06
申请人
HITACHI LTD;HITACHI VLSI ENG CORP
发明人
MATSUDA HIROSHI;ITO KAZUHIRO;NAGANO YUJI
分类号
H01L21/22;H01L31/107
主分类号
H01L21/22
代理机构
代理人
主权项
地址
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