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发明名称
摘要
申请公布号
JPH03125077(U)
申请公布日期
1991.12.18
申请号
JP19900034874U
申请日期
1990.03.30
申请人
发明人
分类号
C30B15/26;C30B29/06;H01L21/208;(IPC1-7):C30B15/26
主分类号
C30B15/26
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