发明名称 COATING APPARATUS
摘要 PURPOSE:To uniformly apply a coating liquid by installing a stopper, which is projected farther than the tip of a coating nozzle and extended in parallel to the coating nozzle, in a needle. CONSTITUTION:A movable body 15 is placed above a table 2 on which a work 1 is put and controlled relatively to the table 2. A coating system having a coating nozzle 6 in the tip of a needle 5 in the lower part is installed in the movable body 15. Then, a stopper which is extended in parallel to the coating nozzle 6 and projected father than the tip of the coating nozzle 6 is installed in the needle 5. As a result, uniform coating of a coating liquid is achieved.
申请公布号 JPH03288567(A) 申请公布日期 1991.12.18
申请号 JP19900090748 申请日期 1990.04.05
申请人 HITACHI LTD;HITACHI TOBU SEMICONDUCTOR LTD 发明人 SATO SHIGEO;NAKAMURA HIROSHI
分类号 B05C5/00;H01L21/52;H05K3/34 主分类号 B05C5/00
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