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发明名称
MANUFACTURE OF SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03288475(A)
申请公布日期
1991.12.18
申请号
JP19900091252
申请日期
1990.04.04
申请人
SEIKO INSTR INC
发明人
AIDA MASANORI
分类号
H01L29/78;H01L29/786
主分类号
H01L29/78
代理机构
代理人
主权项
地址
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