Radiation-sensitive positive resist composition.

摘要

A positive resist composition comprising a radiation-sensitive component, an alkali-soluble resin and a phenol compound of the formula: <CHEM> wherein R is a hydrogen atom, a lower alkyl group or a phenyl group, R' is an alkyl group or an alkoxy group, and n is a number of 0 to 3, which has well balanced good properties such as sensitivity, resolution, heat resistance and adhesiveness.