| 发明名称 |
Positive resist composition. |
| 摘要 |
A positive resist composition comprising an alkali-soluble resin, a quinone diazide compound and a specific hydroxyl group-containing compound (I) can improve sensitivity without deterioration of heat resistance and film thickness retention.
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| 申请公布号 |
EP0461388(A1) |
申请公布日期 |
1991.12.18 |
| 申请号 |
EP19910107339 |
申请日期 |
1991.05.06 |
| 申请人 |
SUMITOMO CHEMICAL COMPANY, LIMITED |
发明人 |
UETANI, YASUNORI |
| 分类号 |
G03F7/022 |
主分类号 |
G03F7/022 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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