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发明名称
FORMATION OF SILICON OXIDE FILM
摘要
申请公布号
JPH03286531(A)
申请公布日期
1991.12.17
申请号
JP19900088057
申请日期
1990.04.02
申请人
KAWASAKI STEEL CORP
发明人
OOTA TOMOHIRO;MIYAZAKI YOSHIHISA;OTSUKA KENICHI
分类号
H01L21/316
主分类号
H01L21/316
代理机构
代理人
主权项
地址
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