申请人 |
HITACHI, LTD.;HITACHI CHEMICAL COMPANY, LTD. |
发明人 |
ISHIKAWA, FUMINORI;TAMAHASHI, KUNIHIRO;ONUMA, SHIGEHARU;WAKAGI, MASATOSHI;HANAZONO, MASANOBU;SHOJI, MITSUYOSHI;NAKAKAWAJI, TAKAYUKI;ITO, YUTAKA;KOMATSUZAKI, SHIGEKI;SHIMAMURA, YASUO;YAMAGISHI, CHIAKI |