| 摘要 |
PURPOSE:To provide the X-ray diffraction device which can make measurement with high accuracy by correcting the rotating angle of a sample rotating means, X-ray source rotating means or detector rotating means in accordance with the fluctuation value of the rotating angle detected by a rotation fluctuation detecting means. CONSTITUTION:Since a sample base 4 is integrated with a sample revolving shaft 7 passing through a sample support 3, the sample base 4 is freely rotatable relative to the sample support 3 around the straight line omega passing the surface of the sample 5. A detector arm 12 and a ray source arm 13 are provided rotatably around the straight line omega independently from the sample 5. A ray source arm 13 and the detector arm 12 are rotated and the sample 5 is irradiated with an X-ray from an X-ray tube 19. The intensity of the diffracted X-ray thereof is measured by an X-ray detector 17. Angle adjustment is made with at least one of the remaining two elements by a control means 11 when a fluctuation in the rotating angle arises in any of the three elements; the sample 5, the X-ray tube 19 and the X-ray detector 17. The fluctuation in the rotating angle is thus corrected. |
