发明名称 EXCIMER LASER DEVICE
摘要 PURPOSE:To freely move a laser oscillator by providing the oscillator, and a gas supplying unit for supplying and discharging laser medium gas and diluted gas, and operating the oscillator by separating it from the unit. CONSTITUTION:Couplers 20-24 are connected to start an operation, old gas of a laser oscillation tube 2 is discharged and new gas is supplied by a gas supplying unit 19. When a predetermined amount of new gas is supplied and a laser oscillator 1 becomes operable, the couplers 20-24 are disconnected, and the oscillator 1 and the unit 19 are separated. The oscillator 1 is not limited by the lengths of gas tubes 9-13 in this state, moved to an arbitrary position and operated. After it is operated for a predetermined period, if there occurs a necessity of renewing gas, the oscillator 1 is again connected to the unit 19 via the couplers 20-24 and may be replaced with new gas.
申请公布号 JPH03285375(A) 申请公布日期 1991.12.16
申请号 JP19900087939 申请日期 1990.04.02
申请人 MATSUSHITA ELECTRIC IND CO LTD 发明人 WANI KOICHI;SHIMADA YASUHIRO;KAWAHARA HIDETO;MIKI TADAAKI
分类号 H01S3/036;H01S3/097 主分类号 H01S3/036
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