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经营范围
发明名称
CLEANING TANK
摘要
申请公布号
JPH03284386(A)
申请公布日期
1991.12.16
申请号
JP19900080826
申请日期
1990.03.30
申请人
SHIBAURA ENG WORKS CO LTD
发明人
MIYASAKO HISAAKI;HIROSE HARUMICHI;SATO HITOSHI;KIMURA CHOICHI
分类号
G02F1/13;B08B3/02;H01L21/304
主分类号
G02F1/13
代理机构
代理人
主权项
地址
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