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发明名称
MANUFACTURE OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH03284837(A)
申请公布日期
1991.12.16
申请号
JP19900086620
申请日期
1990.03.30
申请人
SUMITOMO METAL IND LTD
发明人
NISHIMURA TAKAYUKI
分类号
H01L21/205;H01S5/00
主分类号
H01L21/205
代理机构
代理人
主权项
地址
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