| 摘要 |
PURPOSE:To form a multicomponent synthetic solid soln. film on the surface of a substrate by vaporizing the multicomponent fine grain having a specified composition into the saturated vapor by the heat energy of high-temp. plasma having high-density activation energy, quenching and solidifying the vapor. CONSTITUTION:An aq. soln. of the complex salt having at least two kinds of elements other than water is reduced by alkali to form a crystal of the elements, and the salt component and moisture are removed to form a multicomponent fine grain 6. The fine grain 6 is introduced into the high-temp. plasma having high-density activation energy and vaporized into its saturated vapor, and the vapor is cooled and solidified to obtain a multicomponent synthetic film 3 on the surface of a substrate 11. At this time, the component mixing ratio of the grain 6 and the ratio of the amt. of the grain to that of the gas used are optionally selected, and the multicomponent vapor-deposited film having the desired composition is obtained. |
