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发明名称
COPLANARITY MEASURING DEVICE
摘要
申请公布号
JPH03285340(A)
申请公布日期
1991.12.16
申请号
JP19900086638
申请日期
1990.03.31
申请人
NEC CORP
发明人
KIDA TOMOYUKI
分类号
G01B11/02;H01L21/66;H01L23/50
主分类号
G01B11/02
代理机构
代理人
主权项
地址
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