BEAM BLANKING DEVICE FOR CHARGED BEAM DEVICE,申请号JP19900080614-传众专利搜索

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发明名称	BEAM BLANKING DEVICE FOR CHARGED BEAM DEVICE
摘要
申请公布号	JPH03283247(A)	申请公布日期	1991.12.13
申请号	JP19900080614	申请日期	1990.03.30
申请人	MITSUBISHI ELECTRIC CORP	发明人	MORIMOTO HIROAKI
分类号	G21K1/00;G21K1/08;G21K5/00;H01J37/09;H01J37/147;H01J37/30;H01L21/027;H05H7/00	主分类号	G21K1/00
代理机构		代理人
主权项
地址

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