| 摘要 |
PURPOSE:To hold a workpiece in an upright position through a whole period of machining time by a method wherein, after cut grooves are formed on the workpiece with a wire row and free abrasive grains, a comblike spacer having a plurality of teeth, which can be fitted into each cut groove, is fitted to the cut parts of the workpiece, and then the remaining machining is completed. CONSTITUTION:Cut grooves 9 are formed on a workpiece 5 with a wire row 1 and free abrasive grains. Then, by fitting a comblike spacer 10 to the cut grooves 9, each tooth 11 of the comblike spacer 10 is fitted into each cut groove 9 to further make the cutting, whereby the workpiece 5 is machined without causing any inclined cut. Accordingly, an abrasive liquid is sufficiently supplied into all the cut grooves 9, and the immoderate machining is not done. Further, since intervals among wafers 8 are held even after machining, wash oil reaches sufficiently every part among all the wafers 8, and there is no possibility of the wires 1 being brought into contact with the surfaces of the wafers when the wires 1 are withdrawn; therefore, there is no danger such as of the scondary cutting. |
