| 摘要 |
PURPOSE:To sufficiently adhere a frame to a stage by not only vacuum suctioning one frame of a film which was step fed to a projection position of an image of a photomask but by having periphery parts in a width direction sides of this frame forcefully pressing to the stage with a pressing means other than the vacuum suctioning means. CONSTITUTION:At the time of exposure of one frame of the film F, only the suctioning force by a vacuum pump 52 is applied to one frame of the film F through vacuum suction holes 41, and mainly a central part FC of this one frame is vacuum suctioned to an upper surface of the stage 40. On the other hand, when a signal is fed from a system controller 36 to an air piston 73, a raising/lowering pin 74 is lowered, a press plate 71 is rotated to the lower direction by gravity brought to be tightly adhered to the upper surface of stage 40 sandwiching the periphery parts FA of the width direction sides of one frame of the film F. Therefore, one frame of the film F is tightly adhered to the stage 40 in an appropriate stance by the suctioning force and a press plate 71. Thus, the periphery parts in the width direction sides of one frame of the film F which is sometimes not suctioned can be sufficiently adhered tightly to the stage 40. |
