| 发明名称 |
OPTICAL EMISSION SPECTROSCOPY TO DETERMINE ETCH COMPLETION OF INDIUM TIN OXIDE |
| 摘要 |
ITO is etched by a plasma containing CH3. gas. The intensity characteristic of at least one optical emission line is monitored to determine etch completion. |
| 申请公布号 |
WO9119325(A1) |
申请公布日期 |
1991.12.12 |
| 申请号 |
WO1991US03664 |
申请日期 |
1991.06.03 |
| 申请人 |
EASTMAN KODAK COMPANY |
发明人 |
ROSELLE, PAUL, L. |
| 分类号 |
H01L21/302;C04B41/53;C04B41/91;H01L27/146;H01L31/18 |
主分类号 |
H01L21/302 |
| 代理机构 |
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代理人 |
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| 主权项 |
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| 地址 |
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