发明名称 MOISTURE-FREE SOG PROCESS
摘要 <p>A method is disclosed for applying spin-on glass (SOG) to a substrate over low-melting point, non-refractory materials such as aluminum. The spin-on glass is applied to the substrate in a moisture-free environment to minimize reverse hydrolysis during curing. This results in the formation of higher quality films, especially from inorganic SOGs.</p>
申请公布号 WO1991019316(A1) 申请公布日期 1991.12.12
申请号 CA1991000176 申请日期 1991.05.28
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