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发明名称
METHOD AND DEVICE FOR DISCRIMINATING AIR LEAK IN VACUUM VESSEL
摘要
申请公布号
JPH03281777(A)
申请公布日期
1991.12.12
申请号
JP19900081776
申请日期
1990.03.28
申请人
SUMITOMO ELECTRIC IND LTD
发明人
OMORI NAOYA;YAMAGATA KAZUO;NOMURA TOSHIO
分类号
C23C14/54
主分类号
C23C14/54
代理机构
代理人
主权项
地址
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