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发明名称
DEFECT ANALYZER FOR INTEGRATED CIRCUIT
摘要
申请公布号
JPH03282379(A)
申请公布日期
1991.12.12
申请号
JP19900084241
申请日期
1990.03.30
申请人
NEC CORP
发明人
FUJINAMI KATSUMI
分类号
G01R31/28;G01R31/302;H01L21/66
主分类号
G01R31/28
代理机构
代理人
主权项
地址
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