发明名称 Positive resist composition.
摘要 <p>A positive resist composition comprising a radiation-sensitive compound and an alkali-soluble resin which is obtainable by a condensation reaction of an aldehyde and a specific hydroxyl group-containing compound (I) can improve heat resistance without deterioration of sensitivity and film thickness retention.</p>
申请公布号 EP0460416(A1) 申请公布日期 1991.12.11
申请号 EP19910107338 申请日期 1991.05.06
申请人 SUMITOMO CHEMICAL COMPANY, LIMITED 发明人 UETANI, YASUNORI;OSAKI, HARUYOSHI;TAKEYAMA, NAOKI
分类号 G03F7/023;C08G8/20 主分类号 G03F7/023
代理机构 代理人
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