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发明名称
SEMICONDUCTOR DEVICE
摘要
申请公布号
JPH03280533(A)
申请公布日期
1991.12.11
申请号
JP19900082252
申请日期
1990.03.29
申请人
TOSHIBA CORP
发明人
KAJI SHIGEHIKO;NAKADA RENPEI;ITO HITOSHI;ENDO TAKAYUKI;OKANO HARUO;WATANABE TORU
分类号
H01L21/3205;H01L21/28;H01L21/768
主分类号
H01L21/3205
代理机构
代理人
主权项
地址
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