METHOD FOR REMOVING BLACK PRODUCT IN LASER PROCESSING

摘要

PURPOSE:To completely remove the black product sticking to a processed part by subjecting the neighborhood of this part to a high-frequency discharge in a gaseous mixture composed of oxygen and nitrogen. CONSTITUTION:The black product generated near the processed part when org. matter is processed by using a laser is removed. The neighborhood of the processed part is, thereupon, subjected to the high-frequency discharge in the gaseous mixture composed of the oxygen and the nitrogen. An excimer laser is used for the laser and polyamide for the org. matter. The high-frequency discharge is executed under the conditions under which the sum of the oxygen partial pressure and the nitrogen partial pressure is set larger than 0.2Torr and smaller than 10Torr and the concn. of the gaseous nitrogen is set at <=9mol%. The reliability of the product is improved in this way and the electric power required for a discharge treatment is reduced.