| 摘要 |
PURPOSE:To prevent exhaust of a sample to be analyzed and facilitate replacement of sample table by using a material thereto which is large in the heat capacity and hard to oxidize at high temp., and furnishing a joint removably in the middle between the sample table and a probe carrying it. CONSTITUTION:A sample table 4 is made in a structure with practicability of being mounted on and removed from an insulation 5 through a stainless steel pin, and when coating of a sample to be analyzed is replaced, the table 4 is moved from an ion source chamber to a preliminary exhaust chamber and removed using a probe 6 for loading and unloading the sample. Thus replacement with another sample table is performed. That part of each sample table 4 which is irradiated with primary ions assumes such a form that a groove 12 is cut in stainless steel rectangle of 1cm<3> in volume approximately, and a column of approx. 2cm<3> in volume lies in continuity to the other end, while four pins for insertion 10 are furnished on the end face and coupled with the probe 6 removably through the insulation 5. Cesium is used as ion source, and if the power of the primary ions is assumed to be 25kVX4muA, about 10min retention can be made at a temp. rise of 5 deg.C on the assumption that the volume of the sample table 4 is approx. 3cm<3>. |
