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发明名称
METHOD OF MODIFICATION ON SURFACE OF SOLID SAMPLE
摘要
申请公布号
EP0400651(A3)
申请公布日期
1991.12.11
申请号
EP19900110374
申请日期
1990.05.31
申请人
HITACHI, LTD.
发明人
MOCHIJI, KOZO;SODA, YASUNARI;KIMURA, TAKESHI
分类号
H01L21/302;H01L21/263;H01L21/304;H01L21/306;H01L21/3065;(IPC1-7):H01L21/306
主分类号
H01L21/302
代理机构
代理人
主权项
地址
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