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发明名称
POSITIVE PHOTORESIST COMPOSITION
摘要
申请公布号
EP0440238(A3)
申请公布日期
1991.12.11
申请号
EP19910101307
申请日期
1991.01.31
申请人
FUJI PHOTO FILM CO., LTD.
发明人
UENISHI, KAZUYA;SAKAGUCHI, SHINJI;KOKUBO, TADAYOSHI
分类号
G03F7/023;C07C309/76;G03F7/022;H01L21/027;(IPC1-7):G03F7/022
主分类号
G03F7/023
代理机构
代理人
主权项
地址
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