发明名称 MANUFACTURE OF COLOR SOLID-STATE IMAGE SENSING DEVICE
摘要 <p>PURPOSE:To form a thin film color filter and simplify the structure, by providing a dye-base layer as an isolated independent unit. CONSTITUTION:Transparent polymer resin 3 is spread on a semiconductor substrate 1 on which a solid-state image sensing device is formed, and the element surface is flattened. Photosensitized material such as gelatin, casein, glue and PVA whose viscosity is adjusted is spread on the surface, and dye-base layers 7 are formed by exposure, development, and rinsing process, in the isolated independent state where adjacent layers do not come into contact with each other. Then by using positive type transparent resin 8 as a resist mask, windows are opened only at necessary portions, and dyeing is performed by using magenta dye. Thus a magenta color filter 4 is formed. The similar process is repeated by changing the dye.</p>
申请公布号 JPH03280576(A) 申请公布日期 1991.12.11
申请号 JP19900082443 申请日期 1990.03.29
申请人 MATSUSHITA ELECTRON CORP 发明人 NOMURA TORU
分类号 G02B5/20;H01L27/14;H04N5/335;H04N5/351;H04N5/357;H04N5/369;H04N9/07 主分类号 G02B5/20
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