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发明名称
FORMATION OF POLYCRYSTALLINE SEMICONDUCTOR THIN FILM
摘要
申请公布号
JPH03280528(A)
申请公布日期
1991.12.11
申请号
JP19900082049
申请日期
1990.03.29
申请人
SONY CORP
发明人
TAJIMA KAZUHIRO
分类号
H01L21/20;H01L21/263;H01L21/336;H01L29/78;H01L29/786
主分类号
H01L21/20
代理机构
代理人
主权项
地址
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