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发明名称
PROBING DEVICE
摘要
申请公布号
JPH03280445(A)
申请公布日期
1991.12.11
申请号
JP19900081898
申请日期
1990.03.28
申请人
TOKYO ELECTRON LTD
发明人
YANA HISASHI
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
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地址
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