BLACK BODY RADIATOR FOR USE AS AN EMITTER IN GAS DETECOR CALIBRATION, AND PROCESS FOR PRODUCING IT

摘要

The blackbody radiator contains a doped crystalline silicon body (1) with a honeycombed surface (4) and a controllable electric heater with which the silicon body (1) can be heated. The heater can have a heater coil (21) which can be a silicon structure that is doped in the opposite fashion to the silicon body (1) and to which a controllable voltage is applied. The production process provides for the silicon body (1) with honeycombed surface (4) to be produced from an n-silicon body by electrolytic etching. ……