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发明名称
SUBSTRATE HOUSING CONTAINER
摘要
申请公布号
JPH03278439(A)
申请公布日期
1991.12.10
申请号
JP19900080322
申请日期
1990.03.27
申请人
FUJITSU LTD
发明人
ASANO YOSHIHIDE
分类号
G01R31/26;H01L21/66
主分类号
G01R31/26
代理机构
代理人
主权项
地址
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