| 发明名称 |
ELECTRIC-ELECTRONIC DEVICE INCLUDING POLYIMIDE THIN FILM |
| 摘要 |
An electric-electronic device including a polyimide thin film is disclosed, said polyimide thin film having a thickness of not more than 100 ANGSTROM and a dielectric breakdown strength of not less than 1x106 V/cm. The device has excellent performance properties ascribed to high heat resistance, mechanical strength, chemical resistance and insulating properties of the polyimide thin film.
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| 申请公布号 |
US5072262(A) |
申请公布日期 |
1991.12.10 |
| 申请号 |
US19890418618 |
申请日期 |
1989.10.10 |
| 申请人 |
KANEGAFUCHI KAGAKU KOGYO KABUSHIKI KAISHA |
发明人 |
UEKITA, MASAKAZU;AWAJI, HIROSHI |
| 分类号 |
H01L27/12;G01N27/00;G01N27/414;H01L21/28;H01L21/312;H01L29/51;H01L29/78;H01L29/786;H01L29/94;H01L45/00;H01L49/02;H05B33/22 |
主分类号 |
H01L27/12 |
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