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发明名称
METHOD AND DEVICE FOR EVALUATING SURFACE CONDITION OF SEMICONDUCTOR SUBSTRATE
摘要
申请公布号
JPH03278442(A)
申请公布日期
1991.12.10
申请号
JP19900080386
申请日期
1990.03.27
申请人
DAINIPPON SCREEN MFG CO LTD
发明人
USAMI AKIRA;MATSUKI KAZUNORI;TAKEUCHI TSUTOMU
分类号
H01L21/66;G01R31/308
主分类号
H01L21/66
代理机构
代理人
主权项
地址
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